| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f932d94618d9b875e401457b33e9761 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 |
| filingDate |
2018-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9ed1b7e3fecc5a3e823ad944defb1486
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88640cfb3296544c53b9750addaaa7df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4984491cd8120fd673842a8b57a9e515 |
| publicationDate |
2019-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-109797396-A |
| titleOfInvention |
Silver film etching solution composition, etching method using the same, and metal pattern forming method |
| abstract |
The invention relates to a silver thin film etching solution composition, an etching method using the same and a metal pattern forming method. The silver thin film etching solution composition comprises an organic acid, an inorganic acid, an etching initiator and the balance of water, and the etching stop index is 0.05 to 0.35. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11639470-B2 |
| priorityDate |
2017-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |