http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109791121-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f52dcae8b80ff3b166cb02f8b5e82c72 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-3335 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-333 |
| filingDate | 2017-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_446eb154676153722f312961cafe4533 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c6283c78192d97d72d94916db69f4ff2 |
| publicationDate | 2019-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-109791121-A |
| titleOfInvention | Sensors with fully circumferentially bonded membranes |
| abstract | Embodiments relate to a chemical sensor and a method of making a chemical sensor that includes a membrane with full circumferential bonding. The chemical sensor device includes a silicon substrate including a sensor side and a backside. The sensor side includes a sensor side electrode; a first passivation layer disposed on the substrate; and a second passivation layer on the first passivation layer and adjacent to the sensor side electrode, the passivation layer including exposing the first passivation layer A bond trench for a portion of the passivation layer, and a polyimide ring disposed on the second passivation layer. The backside includes a backside electrode on the backside of the substrate. The substrate includes electrically insulating doped regions such as through silicon vias that electrically connect the sensor side electrodes and the back side electrodes. |
| priorityDate | 2016-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.