| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-549
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D2252-02 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K85-731
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K10-484
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K77-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78645
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-786 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-48 |
| filingDate |
2017-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a7d280e5b5274435287dc1eb4cbe79d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf687a434e90ecdd4908573803927fe8 |
| publicationDate |
2019-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-109789440-A |
| titleOfInvention |
Manufacturing method of film |
| abstract |
The present invention provides a method for producing a high-quality film with a thin film and high uniformity of film thickness and the like. The film production method is a film production method in which a raw material solution containing a film-forming material and a solvent is supplied onto a substrate, and the solvent is dried to form a film on the substrate. A coating blade that holds the raw material solution on the substrate is used, and the coating blade has an opposing surface facing the surface of the substrate, and at least one side surface provided around the opposing surface that is in contact with the raw material solution. The solvent of the raw material solution is dried in a specific direction to form a film. |
| priorityDate |
2016-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |