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filingDate 2018-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2019-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-109725492-A
titleOfInvention Undercoating compositions for use with photoresists
abstract Novel compositions and methods are provided that include antireflective compositions capable of exhibiting enhanced etch rates with standard plasma etchants. Preferred antireflective coating compositions of the present invention have reduced carbon content relative to existing compositions.
priorityDate 2017-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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