http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109682711-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-261 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N5-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-04 |
| filingDate | 2019-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-109682711-B |
| titleOfInvention | Chip for direct in-situ characterization of TEM structure-effect correlation and manufacturing method thereof |
| abstract | The invention provides a chip for direct in-situ characterization of TEM structure-effect correlation and a manufacturing method thereof, wherein the chip comprises a main chip and an auxiliary chip, wherein the main chip comprises: the cantilever beam is provided with an observation hole, a main chip groove, a main chip window and an air hole; the auxiliary chip includes: an auxiliary chip window; detecting the mass change of a sample to be detected on the cantilever beam through the resonance of the cantilever beam; the main chip and the auxiliary chip are oppositely arranged and are respectively fixed on the TEM sample rod, so that a closed space is formed among the main chip, the auxiliary chip and the TEM sample rod, and the appearance change of a sample to be detected on the cantilever beam is observed through the auxiliary chip window, the observation hole and the main chip window. The invention can realize the appearance change observation and the quality change detection of the same sample to be detected in the TEM to carry out direct, in-situ and real-time characterization, and can be widely applied to the TEM in-situ characterization of the nano material in the gas-solid reaction process. |
| priorityDate | 2019-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.