http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109655667-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_709b2c33370e0cc9cba78703c6e8fd67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7a09640a1f427bafd92210fb51a814ad |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2601 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R27-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R27-02 |
| filingDate | 2018-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_965fa82f7912c737a0925b6a12767837 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c1366d42563141e68d41b33b8ea36a67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6ae5b91e605adc00870b3c168de8077 |
| publicationDate | 2019-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-109655667-A |
| titleOfInvention | Method and device for testing edge resistance of silicon wafer after etching |
| abstract | An embodiment of the present invention provides a method and device for testing edge resistance of a silicon wafer after etching. In the method, a preset electrical signal is input at a test point on the front surface of the silicon wafer after etching, and a test point on the back surface away from the front surface is used. The test point of the device obtains the output electrical signal to calculate the edge resistance of the silicon wafer after etching according to the preset electrical signal and the output electrical signal. The embodiment of the present invention provides a method and device for testing edge resistance of silicon wafers after etching, which can test all silicon wafers after etching, improve test efficiency and test data accuracy, and further improve production efficiency and product quality. Rate. |
| priorityDate | 2018-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.