| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K3-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J2363-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D4-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K9-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3081
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J3-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09C1-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09C3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K3-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3085
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D163-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D167-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D175-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09C3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D161-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B32-156
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K9-04 |
| filingDate |
2017-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2022-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2022-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-109562944-B |
| titleOfInvention |
hard mask composition |
| abstract |
Disclosed and claimed herein is a composition for forming a spin-on hardmask having a fullerene derivative and a crosslinking agent. A process for forming a hard mask is also disclosed. |
| priorityDate |
2016-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |