| abstract |
The present application discloses an organic EL display panel, an organic EL display device and a manufacturing method thereof, which improve the protection performance of the organic EL element due to the silicon nitride film with high coverage. The organic EL display panel includes: a substrate; a plurality of organic EL elements formed on the substrate; arranged above the plurality of organic EL elements, and arranged in the order of a first sealing layer, a second sealing layer, and a third sealing layer The sealing layer formed by laminating in order; the first sealing layer, the second sealing layer, and the third sealing layer are respectively composed of amorphous silicon nitride. When the respective compositions of the second sealing layer and the third sealing layer are SiN x , the value of x in the composition of the second sealing layer is greater than either the value of x in the composition of the first sealing layer and the value of x in the composition of the third sealing layer . |