http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109378384-B
Outgoing Links
Predicate | Object |
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classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-549 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K2102-00 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K39-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K85-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K30-15 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-30 |
filingDate | 2018-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2019-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2019-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-109378384-B |
titleOfInvention | A molybdenum sulfide perovskite composite flexible light detection array device and its preparation method |
abstract | The invention belongs to the technical field of micro-nano manufacturing and optoelectronic devices, and discloses a molybdenum sulfide perovskite composite flexible photodetection array device and a preparation method thereof. The preparation method includes the following steps: (1) Preparation by chemical vapor deposition process Continuous molybdenum sulfide film; (2) etching the continuous molybdenum sulfide film into multiple molybdenum sulfide film blocks to form a square array of molybdenum sulfide films, and preparing metal alignment marks on each molybdenum sulfide film block; (3) The square array of molybdenum sulfide thin films and the metal alignment marks are synchronously transferred to the surface of the flexible substrate; (4) preparing metal electrodes on the surface of the molybdenum sulfide thin films, and forming a hydrophobic layer outside the square array of molybdenum sulfide thin films (5) Coating the perovskite solution on the surface of the molybdenum sulfide film to form a perovskite film array, and packaging until the preparation is completed. The invention improves the quality, has good flexibility and stability, and fast response speed. |
priorityDate | 2018-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.