http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109378384-B

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filingDate 2018-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2019-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2019-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-109378384-B
titleOfInvention A molybdenum sulfide perovskite composite flexible light detection array device and its preparation method
abstract The invention belongs to the technical field of micro-nano manufacturing and optoelectronic devices, and discloses a molybdenum sulfide perovskite composite flexible photodetection array device and a preparation method thereof. The preparation method includes the following steps: (1) Preparation by chemical vapor deposition process Continuous molybdenum sulfide film; (2) etching the continuous molybdenum sulfide film into multiple molybdenum sulfide film blocks to form a square array of molybdenum sulfide films, and preparing metal alignment marks on each molybdenum sulfide film block; (3) The square array of molybdenum sulfide thin films and the metal alignment marks are synchronously transferred to the surface of the flexible substrate; (4) preparing metal electrodes on the surface of the molybdenum sulfide thin films, and forming a hydrophobic layer outside the square array of molybdenum sulfide thin films (5) Coating the perovskite solution on the surface of the molybdenum sulfide film to form a perovskite film array, and packaging until the preparation is completed. The invention improves the quality, has good flexibility and stability, and fast response speed.
priorityDate 2018-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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