http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109341523-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-002 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-00 |
| filingDate | 2018-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-109341523-B |
| titleOfInvention | Point diffraction interference three-coordinate measuring device probe end surface leveling method |
| abstract | The invention provides a method for leveling an end surface of a probe of a point diffraction interference three-coordinate measuring device, and relates to the technical field of measurement. The probe zero point position adjusting method based on wave surface symmetry is adopted, a detector obtains initial wave surface data, the probe rotates by 180 degrees, the probe is translated to obtain a wave surface again, the wave surface data is rotated by 180 degrees and then is subjected to difference with the initial wave surface data, the probe is translated to a midpoint position where the initial position and the difference are minimum value positions, the probe is taken as a probe zero point position, the inclination angle of the probe is adjusted to obtain the wave surface data, a Zernike polynomial fitting method is utilized to fit the wave surface data to obtain an xy direction inclination term coefficient, and the angle when the coefficient is maximum value is adjusted to realize probe end surface leveling. The invention solves the technical problem that the leveling of the end surface of the probe relative to the detection surface is difficult to influence the measurement precision in the prior art. The invention has the beneficial effects that: and the end surface state of the probe is determined, the solving requirement of the measurement model is met, and the three-dimensional coordinate reconstruction result is quicker and more accurate. |
| priorityDate | 2018-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID28718 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513094 |
Total number of triples: 12.