http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109326617-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1464 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14685 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14689 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14621 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14627 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14629 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1463 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-146 |
| filingDate | 2017-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-109326617-B |
| titleOfInvention | Image detection device and method for manufacturing same |
| abstract | A method for manufacturing an image inspection device includes providing a substrate having a front surface and a back surface. The method includes removing a first portion of the substrate to form a first trench. The method includes forming a first isolation structure in the first trench, the first isolation structure having an upper surface. The method includes removing a second portion of the first isolation trench and a third portion of the substrate to form a second trench extending through the first isolation structure and into the substrate. The method includes forming a second isolation structure in the second trench. The method includes forming a light detecting region in the substrate. The method includes removing a fourth portion of the substrate to expose a first bottom of the second isolation structure and a backside of the photo-detection region. |
| priorityDate | 2017-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.