http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109297414-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9ba165d54ce666317fde4c5799ce603e |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-2441 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B21-008 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-64 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0675 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B9-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-64 |
| filingDate | 2018-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eccc64f4bbd7900288f0dd6182b0b5cd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d83949d01216889158e865592bff82f2 |
| publicationDate | 2019-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-109297414-A |
| titleOfInvention | Confocal microscopy and microscopy methods for determining layer thickness |
| abstract | Confocal microscopy and microscopy methods for determining layer thickness are involved. A confocal microscope includes: optical components for directing and focusing the illumination light onto the sample; a focus adjustment device for adjusting the relative displacement between the focal position of the illumination light and the position of the sample along the optical axis of the confocal microscope; a light measurement device, Confocal measurement of the illumination light from the sample, with which the measurement signals belonging to the different settings of the focus adjustment device are recorded; the evaluation device, to determine the layer thickness of the sample, is configured for this: to determine the measurement map recorded by the light measurement device The intensity band positions of at least two intensity bands in the measurement map represent the measured light intensities according to the focus positions; and the layer thickness is determined according to the position difference between the intensity band positions. The evaluation device is configured to determine the layer thickness using a mathematical model that describes, for overlapping intensity bands, the dependence of the intensity band position on at least one light wavelength and layer thickness, taking into account the interference of the illumination light at the layer. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115962718-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112013771-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112013771-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-116045824-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-116045824-A |
| priorityDate | 2017-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID44155713 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450350571 |
Total number of triples: 33.