http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109285827-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2033-0095 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-544 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-00 |
| filingDate | 2018-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-109285827-B |
| titleOfInvention | A kind of crystal circle structure and its test method |
| abstract | The invention discloses a kind of crystal circle structure and its test methods, including the substrate and epitaxial layer stacked；The epitaxial layer includes the metal layer and separate layer of Spaced setting；The advantage is that: the different metal layer of multiple layer metal content is arranged on a crystal circle structure, the oxidation data of more metal layers can be obtained simultaneously by once testing, and then obtain the various metals content oxidation data of this kind of power device, time and cost needed for greatly reducing debugging；Due to obtaining the oxidation data of more metal layers simultaneously in same oxidation environment, the uniformity of oxidation environment is improved, reduces test result error caused by the step-up error that may be present as oxidation environment, improves the accuracy of test result. |
| priorityDate | 2018-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.