http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109188231-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a62555ff12316a9a118542896b4c0af7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K59-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2601 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-80 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K59-131 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2018-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_577c718d4efe69679d0d7fe9db437388 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb2b071d0eda67a343d596d0588632a9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c1f4ef36b220df18d14db43873ef6ce3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_19bf4c7e470f2bded137e2eaf6b084ae http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf60be902c8ec485c3697ac70e71341f |
| publicationDate | 2019-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-109188231-A |
| titleOfInvention | Membrane quality detection device and its manufacturing method and detection method |
| abstract | The invention discloses a film quality detection device and a manufacturing method and detection method thereof, which relate to the field of display technology, and can reduce the oxidation strength of the metal layer when the insulating layer is formed under the condition that the film quality performance of the insulating layer is good. The film quality detection device includes a base substrate and at least one capacitor arranged on the base substrate, each capacitor includes a first metal layer, an intermediate insulating layer and a second metal layer that are stacked in sequence; the first metal layer is on the substrate The orthographic projection of the board surface where the substrate is located is located in the orthographic projection of the second metal layer on the board surface where the substrate substrate is located, and has an overlapping area, and the intermediate insulating layer at least has a climbing portion, and the climbing portion is in the positive direction of the board surface where the substrate substrate is located. The projection is in the overlapping area. The manufacturing method of the membrane quality detection device is used for manufacturing the above-mentioned membrane quality detection device. The film quality detection device and its manufacturing method and detection method provided by the present invention are used in the detection of film quality uniformity. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111856239-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111856239-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022111091-A1 |
| priorityDate | 2018-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.