http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109173039-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61M2037-0053 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61M37-0015 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61M37-00 |
| filingDate | 2018-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-109173039-B |
| titleOfInvention | Preparation method of inverted funnel-shaped silicon-based solid microneedle array |
| abstract | The invention provides a preparation method of an inverted funnel-shaped silicon-based solid microneedle array, which comprises the following steps: 1) depositing a front silicon nitride protective film and a back silicon nitride protective film on a monocrystalline silicon wafer; 2) photoresist is spin-coated on the front silicon nitride protective film for photoetching, and the photoetching photoresist forms an array-shaped circular shielding film; 3) etching the front silicon nitride protective film exposed outside the masking adhesive film by a dry method to expose the monocrystalline silicon wafer; 4) carrying out anisotropic etching on a monocrystalline silicon wafer by using an inductively coupled plasma etching system and adopting a deep silicon etching Bosch process, and etching an array-shaped cylinder on the monocrystalline silicon wafer; 5) removing the shielding adhesive film on the monocrystalline silicon wafer; 6) and carrying out isotropic wet etching on the monocrystalline silicon wafer by using the acidic etching solution to obtain the microneedle array. The invention can realize the processing of the solid microneedle array with the inverted funnel-shaped structure with high depth-width ratio, controllable needle point diameter and length. |
| priorityDate | 2018-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.