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publicationDate 2018-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-109103076-A
titleOfInvention Method and apparatus for improved etch stop layer or hard mask layer for memory devices
abstract The present invention relates to methods and apparatus for improved etch stop or hard mask layers for memory devices. In one embodiment, a device includes: an etch stop layer comprising one or more of hafnium, silicon, or magnesium, and aluminum oxide; and a channel through which is deposited on the formed by one or more layers above the etch stop layer, the channel extending to the etch stop layer.
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