http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109087875-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2601 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2018-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-109087875-B |
| titleOfInvention | Automatic accurate fueling injection equipment of wafer test equipment |
| abstract | The invention discloses an automatic accurate oil spraying device of wafer test equipment, which comprises: accurate oil supply unit and oil storage tank, accurate oil supply unit is used for controlling the fuel feeding volume of oil storage tank, accurate oil supply unit is including setting up drive shaft and driven gyro wheel and the coupling hose in the casing, driven gyro wheel is under the drive of drive shaft and is made the circumferencial rotation and intermittent type extrusion coupling hose around the axle center of drive shaft, make the inside negative pressure that forms of coupling hose, take out test oil from the fuel feeding pipe and impress out oil pipe, later flow into the oil storage tank, high-pressurepipe is connected to a side end of oil storage tank, the bottom interface connection nozzle of oil storage tank, gas in the high-pressurepipe is inputed into the oil storage tank and is promoted test oil and through nozzle spraying to. The automatic and accurate oil spraying device of the wafer testing equipment provided by the invention can realize automatic spraying of the test oil on the surface of the wafer, and has the characteristics of high automation level, accurate oil control, simplicity in operation, time and labor saving and cost saving. |
| priorityDate | 2018-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 16.