http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109075000-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-061 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3002 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317 |
| filingDate | 2017-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-109075000-B |
| titleOfInvention | Lanthanum Tungsten Ion Source and Beamline Components |
| abstract | The present invention provides an ion implantation system having one or more conductive components composed of one or more of lanthanum tungsten and a refractory metal alloyed with a predetermined percentage of a rare earth metal. The electrically conductive component may be a component of the ion source, such as one or more of a cathode, a cathode shield, a repeller, a liner, an orifice plate, an arc chamber body, and an impingement plate. The aperture plate may be associated with one or more of an exit aperture, a suppression aperture, and a ground aperture. |
| priorityDate | 2016-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 40.