| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ddbd9538efce6e134d471b912946264e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-033 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-91 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L49-02 |
| filingDate |
2017-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b545ae3bfa4557204442ba2c4e0f6bf5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d7248b24fe7a315657ccbff0ec89e972
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8bcda1efd1ddb3b0e90745c7ffa2cdfd |
| publicationDate |
2018-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-109037444-A |
| titleOfInvention |
Capacitor structure and manufacturing method thereof |
| abstract |
The invention provides a capacitor structure, including: a substrate, a cup-shaped lower electrode, a top support layer, a capacitor dielectric layer and an upper electrode. A cup-shaped lower electrode is located on the substrate. A top support layer surrounds the upper portion of the cup-shaped lower electrode. The material of the top support layer is high dielectric constant material. The capacitive dielectric layer covers the surface of the cup-shaped bottom electrode and the surface of the top supporting layer. The upper electrode covers the surface of the capacitor dielectric layer. The invention also provides a manufacturing method of the capacitor structure. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112951996-A |
| priorityDate |
2017-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |