| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36f8253f3d0d59bcd9259217d4385d10 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5286 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76838
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76852
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-528
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32139 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-528
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2018-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4da10f0d189058cd87e17ee1b8b5ab6b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99959a87a9558229fe9f04c3e26f5378
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5288b54c9c657b3aa645f76616a68640
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a066d8742e480874972c7561e6ace69d |
| publicationDate |
2018-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-109037056-A |
| titleOfInvention |
Method of patterning a power metallization layer and method for processing an electronic device |
| abstract |
Methods of patterning power metallization layers and methods for processing electronic devices are disclosed. According to various embodiments, a method (100) for processing an electronic device may include forming a patterned hardmask layer (206p) over a power metallization layer (202), the patterned hardmask layer (206p) exposing at least one surface region (202s) of the power metallization layer (202); and at least one surface region (202s) of the power metallization layer (202) exposed by wet etching (220) The power metallization layer (202) is patterned. |
| priorityDate |
2017-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |