http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108896458-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-0618 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-0656 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N15-06 |
| filingDate | 2018-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-108896458-B |
| titleOfInvention | Micro sensor, preparation and use method thereof |
| abstract | The invention provides a micro-sensor, a preparation method and a use method thereof.A micro-particle within a specific diameter range in gas to be detected can be screened and captured through an air inlet of the micro-sensor and a micro-filter grid with a specific gap size positioned in a cavity, and the mass of the captured micro-particle is measured through a resonant micro-cantilever beam, so that the environmental information such as the concentration of the micro-particle is obtained; the device has small volume, is convenient for field analysis, has wide application range, and can effectively capture micron-sized and submicron-sized impurity particles in the gas to be detected. |
| priorityDate | 2018-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.