http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108807587-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01Q1-2283 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1804 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01Q1-36 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01Q1-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01Q1-36 |
| filingDate | 2018-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-108807587-B |
| titleOfInvention | Silicon-based chip with function of enhancing mid-infrared spectrum signal and preparation method thereof |
| abstract | The invention discloses a silicon-based chip with a function of enhancing mid-infrared spectrum signals, which comprises a silicon substrate, wherein a Ge buffer layer and a heavily doped Ge layer are sequentially arranged on the silicon substrate, and a sub-wavelength microstructure array is etched on the heavily doped Ge layer. The invention also discloses a preparation method of the silicon-based chip with the function of enhancing the mid-infrared spectrum signal. Compared with a III-V group semiconductor, the silicon-based chip with the function of enhancing the mid-infrared spectrum signal has the characteristic of weak lattice absorption and is more suitable for serving as a molecular sensor chip material; silicon is used as a substrate, so that monolithic integration with an electronic device is facilitated, and the stability and the mass production of the device are greatly improved. |
| priorityDate | 2018-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.