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filingDate 2016-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2018-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-108780755-A
titleOfInvention Thin film transistor, thin film transistor substrate, liquid crystal display device, and manufacturing method of thin film transistor
abstract In a TFT whose channel region is made of an oxide semiconductor, threshold voltage shift due to photo-excited holes in the vicinity of the source electrode and the drain electrode is suppressed, and reliability is improved. Between the oxide semiconductor layer (130) and the gate insulating film (120), a lower semiconductor layer (140) is partially provided. The lower semiconductor layer (140) is present in the source overlapping region (171) where the oxide semiconductor layer (130) overlaps the source electrode (151), and the drain overlap region (152) where the oxide semiconductor layer (130) overlaps the drain electrode (152). At least one of the regions (172). On the other hand, between the source overlapping region (171) and the drain overlapping region (172), there is provided a region where the underlying semiconductor layer (140) does not exist.
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