http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108780281-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b80242c76a84809dcde7b102a4058df8 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F21V29-70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F21K9-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F21V5-04 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F21V8-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F21V29-70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F21V5-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F21K9-60 |
| filingDate | 2017-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2eaaf88369037ae04eeeb1f8d3ff9bb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74f3bb3a16e3edcda9ee113688ea9fa1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b9193d2688bb6eaf0218d5b9480443d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84a1c26e8cc8c985990ef350482090e1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a8ce84067a41b5bd4adc89e50c451f0 |
| publicationDate | 2018-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-108780281-A |
| titleOfInvention | Light source module unit for exposure and exposure device provided with the light source module unit |
| abstract | The invention discloses a light source module unit for exposure. The light source module unit for exposure according to the present invention includes: a light source panel, which arranges a plurality of ultraviolet light emitting elements in an array structure; It is an array structure in a matrix form in a state in which the main optical axis passes through the arbitrary reference central axis side of the center of the ultraviolet light emitting element array from the positions corresponding to the unit light emitting elements respectively. The unit condenser lens has the following structure: The surface is formed in any form selected from a flat surface, a concave surface with a curvature (R) within (‑) 0.15, and a convex surface with a curvature (R) within (+) 0.15, and the light exit surface is formed as a convex lens, The distance (C1) between the ultraviolet light emitting element and the unit condenser lens is arranged to satisfy a value of 0.15<C1/d<0.5 with respect to the diameter (d) of the condenser lens. According to the above structure, the effect is that the diffused light irradiated from each unit ultraviolet light emitting element can be effectively focused on the light receiving area of the exposure device, thereby maximizing the light quantity with low power consumption, especially by realizing high efficiency, high power The single-wavelength and short-wavelength ultraviolet light can ensure the miniaturization of the exposure pattern and greatly improve the exposure performance of the resolution, and can replace the light source of the existing exposure device in terms of practicability and economy. |
| priorityDate | 2016-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.