http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108735749-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_caacf483b6be9ae2d2677103a70559db |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B53-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-11502 |
| filingDate | 2018-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44925a4080c4acae0870a01fa7a1fdca http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a12538dff30b3191e8d6fe0c938a042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1bce15ef2fa201a2784d845cb39bd2d6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a472b4cc18162df807722b3af0d8c3c2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42b7303f16d46c9e7a476be4281d99f6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51ed7fdcc70a3ea89330d3ce072c3983 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9967814868c82361660390fd81e3eb27 |
| publicationDate | 2018-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-108735749-A |
| titleOfInvention | A kind of preparation method and application of yttrium-doped zirconia ferroelectric thin film |
| abstract | The invention provides a preparation method and application of a yttrium-doped zirconium dioxide ferroelectric thin film. First, use inorganic zirconium salt and inorganic yttrium salt as precursors to prepare a clear and transparent all-inorganic yttrium-doped zirconia (ZrYO 2 ) precursor solution; then, according to the thickness requirements of the ZrYO 2 film, the precursor solution can be coated multiple times The ZrYO 2 ferroelectric thin film with orthorhombic phase Pca2 1 space group crystal structure is obtained on the surface of the substrate cleaned by the standard RCA cleaning process, dried, preheated, and rapidly annealed and crystallized. The characteristics of the present invention are: precise and controllable film thickness, good compactness, good film formation uniformity, small surface roughness, small grain size; low cost, simple equipment and operating environment requirements, flexible and controllable content of doping elements, The production process is simple, the process repeatability is good, and the industrialized production is easy to realize. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109920848-A |
| priorityDate | 2018-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 52.