| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B33Y80-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J9-142
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J9-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D18-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J9-149
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B33Y10-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D18-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J9-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J9-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-22 |
| filingDate |
2016-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2021-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-108698206-B |
| titleOfInvention |
Porous chemical mechanical polishing pad |
| abstract |
Embodiments disclosed herein relate generally to polishing articles and methods for making polishing articles for use in polishing processes. More particularly, embodiments disclosed herein relate to porous polishing pads produced by processes that yield improved polishing pad characteristics and performance, including tunable performance. Additive manufacturing processes, such as three-dimensional printing processes, provide the ability to create porous polishing pads with unique characteristics and attributes. |
| priorityDate |
2016-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |