| abstract |
Embodiments of a sensor device and a method for manufacturing the sensor device are disclosed. In one embodiment, a sensor device includes: a PMUT array of piezoelectric micromachined ultrasonic transducers configured to transmit and receive ultrasonic signals, wherein the PMUT array includes a plurality of PMUTs and the PMUT array is flexible one or more integrated circuits configured to process the ultrasonic signals; a battery configured to provide power to the PMUT array and the one or more integrated circuits; a coupling material configured to hold the PMUT array, the one or more integrated circuits, and the battery; and an enclosure configured to seal the PMUT array, the one or more integrated circuits, the battery, and the coupling material within the enclosure. |