| abstract |
The present invention provides a polycrystalline dielectric film in which the main component is represented by the general formula (M (1)) 1‑x M(2) x )(M(3) 1‑y M(4) y )(O 1‑ z N z ) 3 The oxynitride composition shown. X < 0 > x < 1, y < 1, 0 < z < 1/3. The sum of the formal valences of M (1), M (2), M (3) and M (4) is 14. The crystal structure of oxynitride includes an octahedral structure composed of a central atom, 2 atoms at 4a positions, and 4 atoms at 8h positions. The central atom is M (3) or M (4). The atom at the 4a position is an O atom or an N atom. The 8 h-position atom is an O atom or an N atom. In the octahedral structure, when an angle formed by a straight line connecting 2 atoms at 4a positions and a c-axis direction of the crystal structure is represented by θ, 0.5 ° ≦ θ ≦ 12 °. |