| abstract |
A vacuum processing system (100) for flexible substrates is provided. The vacuum processing system (100) includes: a first chamber (110) adapted to accommodate a supply roll (111) for providing flexible substrates; a second chamber (120) adapted to accommodate a take-up roll (121) for storing the flexible substrate (160) after processing; a substrate transport arrangement comprising one or more guide rollers (104) for guiding the flexible substrate from the first chamber (110) to the second chamber (120); maintenance zone (130), between the first chamber (110) and the second chamber (120), wherein the maintenance zone (130) allows access to or belongs to the first chamber (110) and the second chamber (120) A maintenance channel for at least one of the chambers; and a first processing chamber (140) for processing the flexible substrate (10). |