http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108550515-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_93b98ed910572f0029cec3b1223e42fa |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32458 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32412 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23H5-08 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23H5-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2018-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0500b70e1879af6db4a6565c37cc396c |
| publicationDate | 2018-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-108550515-A |
| titleOfInvention | The grinding technics of ion implantation technology cavity |
| abstract | The invention discloses a kind of grinding technics of ion implantation technology cavity, including processing step successively as follows：To the electrolytic polishing of cavity sealing surface, normal pressure cleaning, a high-pressure wash, neutralisation treatment, secondary high-pressure cleaning, steam clean, three times high-pressure wash, drying；The electrolyte used in electrolytic polishing process by mass percent for 60~70% phosphoric acid, 20~30% sulfuric acid and 3~10% the mixed liquor that constitutes of hydrofluoric acid.The present invention treated ion implantation technology cavity, roughness can reach the range of Ra1.0 to 2.0, reduce external waviness, such discharge quantity is few, more effectively ensure that the vacuum degree of cavity. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111650676-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109881243-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113293421-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111650676-A |
| priorityDate | 2018-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.