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filingDate 2016-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2021-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2021-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-108474765-B
titleOfInvention Acoustic resonator with reduced mechanical clamping to enhance shear mode response
abstract The present disclosure provides an acoustic resonator with reduced mechanical clamping of the active area for enhanced shear mode response. More specifically, the present disclosure provides a solid-state assembled BAW resonator device having an active area of piezoelectric material laterally surrounded by an inactive area with a reduced thickness of piezoelectric material such that at least an upper portion of the inactive area along a boundary of the active area is free of piezoelectric material. The resonator device provides discontinuities along opposite lateral edges of the piezoelectric material of the active area to reduce mechanical clamping of the active area in the direction of maximum lateral displacement in shear mode operation. Increasing the mechanical isolation of the active area of the piezoelectric material reduces the mechanical damping of the lateral vibration of the active area, which enhances the shear mode response to quasi-shear mode sensing.
priorityDate 2015-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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