http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108474765-B
Outgoing Links
Predicate | Object |
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classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0423 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0422 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0255 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0256 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2009-155 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-036 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02015 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02086 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-13 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-5438 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-172 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-175 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-036 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-17 |
filingDate | 2016-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2021-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2021-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-108474765-B |
titleOfInvention | Acoustic resonator with reduced mechanical clamping to enhance shear mode response |
abstract | The present disclosure provides an acoustic resonator with reduced mechanical clamping of the active area for enhanced shear mode response. More specifically, the present disclosure provides a solid-state assembled BAW resonator device having an active area of piezoelectric material laterally surrounded by an inactive area with a reduced thickness of piezoelectric material such that at least an upper portion of the inactive area along a boundary of the active area is free of piezoelectric material. The resonator device provides discontinuities along opposite lateral edges of the piezoelectric material of the active area to reduce mechanical clamping of the active area in the direction of maximum lateral displacement in shear mode operation. Increasing the mechanical isolation of the active area of the piezoelectric material reduces the mechanical damping of the lateral vibration of the active area, which enhances the shear mode response to quasi-shear mode sensing. |
priorityDate | 2015-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 42.