http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108435744-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B03C1-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B03C1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B13-00 |
| filingDate | 2018-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-108435744-B |
| titleOfInvention | Metal particle collecting device and metal particle collecting system |
| abstract | The invention relates to a metal particle collecting device and a metal particle collecting system. Metal particle collection device for collect the metal particle in the mask plate washing pond, include: a pressure detecting unit for detecting a pressure when the cleaning liquid flows; a metal particle attaching member for attaching metal particles; an electromagnet for generating a magnetic attraction force to the metal particles to attach the metal particles to the metal particle attaching member; the metal particle attaching piece is positioned at the periphery of the electromagnet; and a control unit that controls the magnetic attraction force of the electromagnet based on the detection result of the pressure detection unit. When the flow of the cleaning liquid is started, the pressure detecting unit can detect the pressure at which the cleaning liquid flows. Then, a detection result is output to the control unit, and the control unit controls the magnetic attraction force of the electromagnet based on the detection result so that the metal particles are attached to the metal particle attaching piece, and therefore the metal particles in the mask plate cleaning pool can be reduced. |
| priorityDate | 2018-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419491804 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359268 |
Total number of triples: 14.