http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108315714-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-5096 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-26 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-509 |
| filingDate | 2018-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-108315714-B |
| titleOfInvention | The preparation method of controllable high-density plasma preparation facilities and graphene film |
| abstract | The present invention relates to a kind of controllable high-density plasma preparation facilities, including vacuum chamber, top crown in vacuum chamber, bottom crown below face top crown, inductance coil, vacuum-pumping system, top crown and bottom crown are arranged in parallel and spacing is adjustable, inductance coil is between top crown and bottom crown and its axis center is horizontally disposed, top crown, inductance coil and bottom crown are connected separately with the first power supply, second source and third power supply, several apertures are evenly equipped on top crown, bottom crown lower surface is also connected with heater, vacuum chamber is also provided with air inlet, air inlet pipe is equipped in air inlet, air inlet pipe is connected to external gas source.The preparation process of uniform, plasma density, ionic flux, ion energy the plasma independently regulated and controled of large area may be implemented in the present invention, and can prepare graphene film under the conditions of silicon carbide substrate surface low-temperature. |
| priorityDate | 2018-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.