http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108292914-B

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filingDate 2016-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2021-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2021-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-108292914-B
titleOfInvention elastic wave device
abstract The elastic wave device (1) includes: a piezoelectric substrate (10); IDT electrodes (11) and electrode pads (13) formed on a surface (10a) of the piezoelectric substrate (10); and a support layer (15) on the The surface (10a) is formed to surround the IDT electrode (11); the first cover layer (16) and the second cover layer (17) are formed on the support layer (15), and the support layer (15) and the piezoelectric substrate ( 10) The IDT electrode (11) is sealed together by the hollow space (14); the UBM (21) is bonded to the electrode pad (13); and the bump (20) is bonded to the UBM (21), the UBM ( 21) The shape of the joint surface with the bump (20) is a spherical shape that is convex toward the bump (20).
priorityDate 2015-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

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Total number of triples: 39.