http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108291301-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4f51818f4238424fa5e29f12c21502ca |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-448 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-407 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-301 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B35-007 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B23-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 |
| filingDate | 2016-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d19757a5ef64f301f4aa1b08fa9779d8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1328ad301f5e429b00bf5cdbfc7d1ea |
| publicationDate | 2018-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-108291301-A |
| titleOfInvention | Method for Metal-Organic Vapor Phase Deposition Using Hydrocarbon Solutions of Alkyl-Indium Compounds |
| abstract | The present invention relates to a method for the preparation of indium-containing layers by metal-organic vapor deposition, wherein the indium-containing layers are grown on a substrate in a reaction chamber, wherein the indium is delivered in the form of an indium-containing precursor compound having the formula InR to a process wherein the groups R are independently selected from alkyl groups having 1 to 6 C atoms, characterized in that the delivery of the indium-containing precursor compound takes place in the form of a solution comprising a solvent and dissolved therein An indium-containing precursor compound wherein the solvent has at least one hydrocarbon having 1 to 8 carbon atoms. The invention also relates to a solution consisting of compounds of the formula InR 3 , wherein R are independently selected from alkyl groups having 1 to 6 C atoms, and at least one compound having 1 to 8 C atoms Atomic hydrocarbons, use of the solution for producing indium-containing layers by metal-organic vapor deposition, and devices for carrying out the method. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110983300-A |
| priorityDate | 2015-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 74.