http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108203075-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-02 |
| filingDate | 2016-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-108203075-B |
| titleOfInvention | MEMS device, preparation method thereof and electronic device |
| abstract | The invention relates to an MEMS device, a preparation method thereof and an electronic device. The MEMS device includes: a substrate; the vibrating diaphragm is positioned above the substrate; the back plate is positioned above the vibrating diaphragm; a cavity between the diaphragm and the backplate; the surface of the back plate opposite to the vibrating diaphragm is provided with a plurality of stopping structures extending towards the vibrating diaphragm, and the stopping structures are in hollow annular shapes. The novel stop structure design (design Stopper) adopts a thinner annular structure, so that the whole contact area can be effectively reduced. The adhesive force is reduced, and the reliability of the new structure is better under the condition that the sensitivities of the vibrating diaphragms (lower polar plates) are the same. In addition, the density design of the patterns of the stop structure is optimized, the periphery is densely distributed, the middle is sparsely distributed, and the failure of the middle area of the lower polar plate can be effectively prevented. |
| priorityDate | 2016-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 15.