http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108063115-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5384 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0262 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-538 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762 |
| filingDate | 2017-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-108063115-B |
| titleOfInvention | TSV adapter plate for system-in-package and preparation method thereof |
| abstract | The invention relates to a TSV adapter plate for system-in-package and a preparation method thereof, wherein the method comprises the following steps: selecting a Si substrate; preparing a plurality of TSVs and a plurality of isolation trenches in the Si substrate; filling the isolation trench and the TSV to form an isolation region and a TSV region respectively; preparing a gate region of the MOS tube on the upper surface of the Si substrate; preparing a source region and a drain region of the MOS tube by using an ion implantation process; preparing an interconnection line between the first end face of the TSV region and the MOS tube on the upper surface of the Si substrate; and preparing a metal salient point on the second end face of the TSV region. According to the TSV adapter plate, the ESD protection device MOS tube is processed on the TSV adapter plate, so that the antistatic capacity of the stacked packaged chip is enhanced. |
| priorityDate | 2017-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.