http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108054634-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-343 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-323 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-22 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-343 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-12 |
| filingDate | 2018-01-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-108054634-B |
| titleOfInvention | Narrow linewidth semiconductor laser |
| abstract | The invention discloses a narrow linewidth semiconductor laser and a preparation method of the laser. The method discloses a semiconductor laser structure which is prepared on a substrate and sequentially comprises an N-type buffer layer, an N-type lower limiting layer, an N-type lower waveguide layer, a laser active region, a P-type upper waveguide layer, a P-type upper limiting layer and a P-type cover layer from the substrate to the top. And preparing a mask on the epitaxial wafer of the laser structure by adopting a PECVD method, and manufacturing a ridge waveguide of the laser by utilizing an inductively coupled plasma etching technology. And manufacturing an effective refractive index perturbation grating structure unit on the ridge waveguide by adopting inductive coupling plasma etching. |
| priorityDate | 2018-01-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5354495 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549163 |
Total number of triples: 19.