| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2003-0435
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2003-021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2003-0442
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2003-023 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-0514
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-173
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02157
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-17 |
| filingDate |
2017-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2021-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-108023560-B |
| titleOfInvention |
Bulk acoustic wave resonator and method of manufacturing the same |
| abstract |
The invention provides a bulk acoustic wave resonator and a method for manufacturing the bulk acoustic wave resonator. The bulk acoustic wave resonator includes: a substrate, a substrate protection layer disposed on a top surface of the substrate; a film layer defining a cavity with the substrate; and a resonance part disposed on the film layer. The film layer includes a first layer and a second layer, the second layer having the same material as the first layer, and the second layer having a density greater than a density of the first layer. |
| priorityDate |
2016-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |