http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108020165-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-41 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-41 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06 |
| filingDate | 2017-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-108020165-B |
| titleOfInvention | Method and system for measuring thickness of non-metallic material by using terahertz waves |
| abstract | The invention provides a method and a system for measuring the thickness of a non-metallic material by utilizing terahertz waves. The method of the invention comprises the following steps: vertically irradiating the terahertz wave to the surface of the non-metal material, respectively reflecting the terahertz wave by the surface and the bottom surface of the non-metal material to form a first reflected signal and a second reflected signal, receiving the first reflected signal and the second reflected signal, and obtaining a receiving time difference delta T of the two reflected signals 1 (ii) a Make the terahertz wave at an angle theta i The terahertz waves are incident to the surface of the non-metallic material, the terahertz waves are reflected by the surface and the bottom surface of the non-metallic material to form third and fourth reflection signals respectively, the third and fourth reflection signals are received, and the receiving time difference delta T of the two reflection signals is obtained 2 Wherein 0 degree<θ i <90 degrees; according to the difference of receiving time DeltaT 1 And Δ T 2 Obtaining the refractive index n of the non-metal material; and obtaining the thickness d of the non-metal material according to the refractive index n of the non-metal material. The method can directly measure the refractive index and the thickness of the non-metallic material, and has small measurement error and high accuracy. |
| priorityDate | 2017-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 15.