http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108003273-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-282 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F283-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-28 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F283-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-06 |
| filingDate | 2017-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-108003273-B |
| titleOfInvention | PH response type polymer, preparation method thereof and photoresist composition |
| abstract | The invention provides a pH response type polymer, a preparation method thereof and a photoresist composition. The photoresist composition comprises the following components in percentage by weight: 1-10% of pH response type polymer with a structure shown in formula I or formula II, 5-30% of resin, 0.1-1% of photosensitizer and the balance of solvent, wherein m is an integer of 20-100, n is an integer of 20-100, x is an integer of 1-4, R 1 Is a methyl group or a hydrogen atom, R 2 Is methyl or hydrogen atom, and R is methyl or hydrogen atom. The photoresist composition has the characteristic of volume shrinkage under an acidic condition, can prevent undercut phenomenon in the etching process of films such as a grid electrode, a source electrode, a drain electrode, a metal oxide pixel electrode, a metal oxide active layer and the like, and reduces the incidence rate of short circuit type defects, thereby improving the product yield. |
| priorityDate | 2017-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 70.