http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108002815-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-94 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3293 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3286 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-622 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-62605 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-01 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-626 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-622 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate | 2017-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-108002815-B |
| titleOfInvention | Preparation method of tubular ITO target material |
| abstract | The invention provides a preparation method of a tubular ITO target, which comprises the steps of filling ITO powder into a sheath container, and preparing the ITO tubular target through hot isostatic pressing treatment, wherein the sheath container comprises an inner cylinder sheath and an outer cylinder sheath, the wall thickness of the inner cylinder sheath is more than 2 times of that of the outer cylinder sheath, the wall thickness of the inner cylinder sheath is 3-10 mm, and the wall thickness of the outer cylinder sheath is 1-3 mm. According to the preparation method, the tubular ITO target can be directly prepared by one-step molding of the ITO waste target through a hot isostatic pressing method after mechanical crushing, the period of recycling the waste target to generate refined indium and reusing the refined indium to prepare the target is greatly shortened compared with the traditional process, the production cost is saved, large-scale production is easy to realize, and the production efficiency is high; in addition, strong acid, strong alkali and organic additives are not needed in the production process, thereby reducing the environmental pollution. |
| priorityDate | 2017-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.