http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107978519-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f80f7502fa29eccce5d0ca3b654f4d96 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-27 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-40117 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-11582 |
| filingDate | 2017-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_82278ec468f245a358c1a36d2bfebb1c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7fe853385270cde1fdd758f9bc37b776 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_062990d3fec4a823b6de59399aa6457b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6b713da3eeb5ff9c815a605253867ce http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75adb27a8df3ffbad45419f94da977f5 |
| publicationDate | 2018-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-107978519-A |
| titleOfInvention | Manufacturing method of metal tungsten grid in three-dimensional NAND |
| abstract | The invention discloses a method for manufacturing a metal tungsten grid in a three-dimensional NAND, which is characterized in that the method includes: providing a substrate; depositing a dielectric barrier layer on the substrate; depositing a seed layer on the dielectric barrier layer; Metal tungsten is deposited on the layer; dry etching is performed on the metal tungsten; and wet etching is performed on the metal tungsten after dry etching. In the present invention, the technology of dry etching first and then wet etching is used to etch tungsten. Among them, dry etching can make the width of metal tungsten in the groove more consistent after etching, and wet etching can make the width of tungsten more consistent. Etching can obtain a better microscopic profile of the etched metal gate. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111146142-A |
| priorityDate | 2017-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.