http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107946163-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-334 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4404 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32467 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32477 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32495 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-08 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2017-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-107946163-B |
| titleOfInvention | Chemical conversion of yttrium oxide to yttrium fluoride and yttrium oxyfluoride to develop anticorrosion coatings for pretreatment of plasma components |
| abstract | Embodiments of the present disclosure provide a chamber component for use in a plasma processing chamber arrangement. The chamber components may include a coating that provides a fluorine-rich surface. In one embodiment, a chamber component for use in a plasma processing apparatus includes a body having an outer layer comprising yttrium oxide, the body having a coating formed thereon, wherein the coating comprises yttrium fluoride comprising s material. |
| priorityDate | 2016-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 54.