http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107924117-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B15-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2379-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2311-24 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-64 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-66 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-64 |
| filingDate | 2016-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-107924117-B |
| titleOfInvention | Pellicle module frame, pellicle module containing the same, method for producing pellicle module frame, and method for producing pellicle module |
| abstract | An object of the present invention is to provide a pellicle module frame which is hardly deteriorated even when irradiated with short-wavelength light such as excimer light, and which hardly generates outgas or foreign matter, and a pellicle module using the same. In order to achieve the above object, a pellicle module frame is provided which supports the outer periphery of the pellicle film, and includes a frame and a film containing a polyimide resin formed on the surface of the frame. |
| priorityDate | 2015-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 255.