http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107910030-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11C11-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11C11-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N50-10 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11C11-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L43-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11C11-14 |
| filingDate | 2017-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-107910030-B |
| titleOfInvention | A kind of preparation method of flexible BNT ferroelectric thin film |
| abstract | The invention discloses a preparation method of a flexible BNT ferroelectric thin film. The method comprises the following steps: 1) preparing a strontium ruthenate bottom electrode on a muscovite substrate by a laser pulse deposition method; 2) preparing BNT iron by a sol-gel method A precursor solution for an electric thin film, wherein the concentration of the precursor solution is 0.05-0.1 mol/L; 3) spin-coating the BNT precursor solution on the above-mentioned strontium ruthenate bottom electrode by spin coating to obtain a uniform wet film; 4) The uniform wet film obtained above is subjected to drying, pyrolysis and annealing treatment; 5) repeating steps 3)-4) for 4-6 times to obtain a flexible BNT ferroelectric thin film, the thickness of the thin film is 200nm-300nm. The invention provides a flexible BNT ferroelectric thin film material with simple process and excellent ferroelectric performance. |
| priorityDate | 2017-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.