| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-354
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-3507
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-95676 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-1673
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-2308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-1083
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-353
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-2383
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-37
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8806
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-956
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-3551
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-1643
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-0092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-3501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-1611 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-23 |
| filingDate |
2013-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af9bcd4fcca3d996b4d708a23c010a99
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ea4e2b07ae6c4daea65e56c74ce9438
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7eac7a75282345698d3352512437a46d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44fc59a1685dd38699d52762a3cc7e0c |
| publicationDate |
2018-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-107887778-A |
| titleOfInvention |
Solid-state laser and inspection system using 193nm laser |
| abstract |
Embodiments of the present invention relate to a solid-state laser and an inspection system using a 193nm laser. The present invention discloses improved laser systems and associated techniques that generate an ultraviolet UV wavelength of approximately 193.368 nm from a fundamental vacuum wavelength of approximately 1064 nm. A preferred embodiment splits off the unconsumed portion of the input wavelength of at least one stage and redirects the unconsumed portion for use in another stage. The improved laser system and associated techniques result in less expensive, longer-lived lasers than lasers currently used in industry. These laser systems can be constructed from readily available, relatively inexpensive components. |
| priorityDate |
2012-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |