| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F26B5-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J11-002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-135
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F26B5-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F26B9-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F26B3-30 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-56 |
| filingDate |
2017-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_352e7bc57560deddcc3c3aff2b9805ee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0e5bc986e588c3a8b08ca75e6cc147c |
| publicationDate |
2018-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-107878044-A |
| titleOfInvention |
Decompression drying device |
| abstract |
In the reduced-pressure drying apparatus that performs both the reduced-pressure drying treatment of the solvent on the substrate and the removal treatment of the solvent on the solvent trap, the time for the reduced-pressure drying treatment and the time for the removal treatment can be shortened with a simple device structure. The reduced-pressure drying device (1) dries the solution on the substrate (W) contained in the chamber (10) under reduced pressure, and includes a mesh plate that temporarily captures the solution evaporated from the substrate (W). The solvent trapping part (30) of the solvent in the solvent, the solvent trapping part (30) is arranged in the chamber (10) in the manner opposite to the substrate (W), and the opening ratio of the mesh plate constituting the solvent trapping part (30) is 60% or more and 80% or less, and the heat capacity per unit area is 850J/K·m 2 or less. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111873648-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111873648-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110421977-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110421977-A |
| priorityDate |
2016-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |