http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107850837-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2d4ba6b2e50fefcae1a13b759f0f208c http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fff37d93db0f039de51e908c77195efe |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J31-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J35-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J35-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J31-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2016-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ab96ae2df557723d8aefc5349960e3d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0271d758050720d79cc523a6daca2331 |
| publicationDate | 2018-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-107850837-A |
| titleOfInvention | Method for producing organic acid ester liquid, and method for producing resist solvent for electronic parts production or cleaning solution for electronic parts production |
| abstract | The subject is to provide a method for manufacturing electronic parts, which can manufacture electronic parts precisely, reduce defective products, and produce electronic parts with good yield, and especially provide a method that can provide more excellent resistance in each step of manufacturing electronic parts using liquid. Solution and cleaning solution method. The solution to this problem relates to a method for producing an organic acid ester liquid. The production method is to use an organic acid ester liquid that is a resist solvent for electronic parts production or an organic acid ester liquid that is a cleaning solution for electronic parts production. A method for removing the organic peroxide contained in the method, and the manufacturing method removes the organic peroxide in the organic acid ester liquid by contacting the organic acid ester liquid with a platinum group metal catalyst; and involves an electronic Resist solvents for parts production or cleaning solutions for electronic parts production, which are obtained by removing organic peroxides contained in organic acid ester liquids using this production method, and have a peroxide value (POV) of 2 mmoL/kg or less. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111141776-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111141776-B |
| priorityDate | 2015-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 131.