http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107835477-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R2201-003 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R19-005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R19-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R1-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R1-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R7-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R1-28 |
| filingDate | 2017-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-107835477-B |
| titleOfInvention | MEMS microphone |
| abstract | The invention discloses an MEMS (micro-electromechanical system) microphone which comprises a substrate, a first vibrating diaphragm and a second vibrating diaphragm, wherein a sealing cavity is formed between the first vibrating diaphragm and the second vibrating diaphragm; the back electrode unit is positioned in the sealing cavity and forms a capacitor structure with the first vibrating diaphragm and the second vibrating diaphragm, and a plurality of through holes penetrating through two sides of the back electrode unit are formed in the back electrode unit; wherein, the sealing cavity is filled with gas with the viscosity coefficient smaller than that of air. According to the MEMS microphone, the gas with the viscosity coefficient smaller than that of air is filled in the sealed cavity, so that the acoustic resistance of the two vibrating diaphragms in relative motion to the back pole can be greatly reduced, and the noise of the microphone is reduced. Meanwhile, the gas with low viscosity coefficient is used for filling, so that the pressure in the sealed cavity is consistent with the pressure of the external environment, the problem of diaphragm deflection caused by pressure difference is avoided, and the performance of the microphone is ensured. |
| priorityDate | 2017-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.